The substrate the Pt thin film and use that thin film which is unified heater, the temperature detection component and the gas sensor

摘要

PURPOSE: To prevent the occurrence of a film exfoliation trouble by securing adhesive strength by controlling the structure of a Pt thin film when a Pt thin film resistor is used as a micro-sensor. ;CONSTITUTION: The thin film has the degree of orientation, defined by the formula I mentioned separately, of 60% or higher and the size of crystallite, computed by the Scherrer's formula defined by the formula II, of 0.01μm or higher. In the formula I(111), the (111) surface diffraction strength ΣI (hk1) in an XRD measurement indicates the sum of intensity of all diffraction intensity measured in the range of measurement, D_hkl indicates the size (Å) of the crystallite in vertical direction to the (hk1) surface, (λ) indicates the wavelength (Å) of X-rays, (β) indicates the width of diffraction beam (rad), (θ) indicates diffraction angle (degree), and (K) indicates a constant of 0.9. As a result, the adhesive strength of the Pt thin film is increased, and a strong thin film resistor can be obtained.;COPYRIGHT: (C)1995,JPO