WORK CONVEYING DEVICE, AND SEALING STRUCTURE OF TRAVELING PATH OF WORK CONVEYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sealing structure capable of preventing dust generated in a traveling path of a work conveying device using a guide rail from leaking in a clean room.;SOLUTION: The work conveying device 10 is equipped with a work holding means 11 and a horizontally moving means 12 for moving the work holding means 11 in a horizontal direction. A straight moving mechanism included in the horizontally moving means 12 is covered with a duct 17, and includes the traveling path A having a guide part 18 inside, a traveling body 20 for engaging with the guide part 18 and traveling an inner space of the traveling path A, and a slider 21 for integrally traveling with the traveling body 20. A cleaning means 30 for cleaning air in an inside of the traveling path A and discharging to an outside is provided on the travailing path A with an appropriate interval. Furthermore, a sealing means 40, which does not obstruct travel of a connecting member 22 and can be deformed, may be provided on a part of an elongate clearance 28 where the connecting member 22 for connecting the slider 21 to the traveling body 20 passes through the duct 17. Leaking dust is reduced, and high cleanliness in the clean room can be maintained.;COPYRIGHT: (C)2003,JPO