PROBLEM TO BE SOLVED: To provide a soft X-ray source comprising a discharge plasma source from which a larger amount of soft X-ray can be taken out than before. SOLUTION: An insulator 101 is formed of SiC ceramic and manufactured by rolling up and then baking a mesh-like processed sheet. The opening ratio of the mesh is 90%. An electrode 2 is formed of Mo having a high melting point. When charges are accumulated in a capacitor 4 and then a switch 5 is closed, discharging is started on the surface of the insulator 1, and a cylindrical plasma 6 is generated (b). A large amount of current flows through the plasma 6 between/to electrodes to form a magnetic field, and the magnetic field thus formed compresses the cylindrical plasma 6 in the center axial direction to converge (pinch) the plasma 6 (c). The plasma 6 thus pinched radiates soft X-ray 7. The soft X-ray radiated is discharged from the openings of the mesh of the insulator 101 to the outside, and thus the solid angle at which the soft X-ray can be taken out is larger than ever before.
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