SOFT X-RAY LIGHT SOURCE DEVICE AND EUV EXPOSURE APPARATUS AND ILLUMINATING METHOD

摘要

PURPOSE: To make effective use of light beams from light sources when a plurality of discharge plasma light sources are bundled. CONSTITUTION: This soft X-ray light source device comprises a plurality of point light sources; a light collecting and reflecting optical system for collecting the light beams from the plurality of point light sources at one point; an angle- adjustable mirror for reflecting the light beams coming from the light sources and passed through the light collecting and reflecting optical system; and an angle control part for reflecting the light beams from the point light beams in the same direction by varying the angle of the mirror according to the light beams impinging on the mirror.