ORGANIC SUBSTANCE SEPARATION METHOD AND ORGANIC SUBSTANCE SEPARATION EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide an organic substance separation method and organic substance separation equipment wherein the life time of a chemical solution is prolonged and highly effective treatment is performed in organic substance elimination.;SOLUTION: A prescribed chemical solution is stored in a treatment tank in which an organic substance is separated (treatment S1), while a solution which is added as an active species to the chemical solution is turned into mist in the other tank (treatment S2). The mist solution is mixed with cleaning gas and supplied to the treatment tank becoming a foam state (treatment S3). In this state, an object to be treated is loaded in the treatment tank, and separation treatment of an organic substance is performed. This method can be applied to an object wherein the organic substance is desired to be eliminated, e.g. a semiconductor wafer wherein a resist layer should to be exfoliated is stuck, a semiconductor wafer wherein particles should to be exfoliated are stuck, other worked products, components in various kinds of manufacturing equipment, etc. The chemical solution is, e.g. a sulfuric acid-hydrogen peroxide water mixed solution, and the solution which is to turn into mist is hydrogen peroxide water.;COPYRIGHT: (C)2004,JPO