MANUFACTURING PROCESS MANAGING TEST CIRCUIT FOR SEMICONDUCTOR INTEGRATED CIRCUIT AND METHOD FOR MANAGING MANUFACTURING PROCESS OF SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide the manufacturing process managing test circuit for a semiconductor integrated circuit, which can be used as the monitor of a product manufacturing process whose low cost is requested in the actual process of semiconductor manufacture, and to provide the managing method of the manufac turing process of the semiconductor integrated circuit, which prevents the drop of the yield of a product chip or can solve the failure cause of the manufactur ing process when the failure such as the low yield of the product chip occurs.;SOLUTION: The circuit is provided with a plurality of elements to be measured, a selecting circuit which sequentially selects each element, and a plurality of switch elements which are connected to a plurality of measurement elements and used for measuring the characteristics of the elements to be measured. Since a plurality of elements to be measured, the selecting circuit and a plurality of switch elements are installed in the band-like scribe area of the semiconductor substrate.;COPYRIGHT: (C)2003,JPO