Indium oxide powder, method for preparing the same, and method for manufacturing high-density indium tin oxide target

摘要

In₂O₃ powder, a method for preparing the In₂O₃ powder, and a method for manufacturing an indium tin oxide (ITO) target using the In₂O₃ powder. In the method for preparing the In₂O₃ powder, an alkaline precipitate is added to an indium solution having an indium ion concentration of about 2-5 M at a rate of about 0.5-4 L/min while the pH of the indium solution is adjusted to about 5-9, to form an In(OH)₃ precipitate. Next, the precipitate is precipitated at a temperature of between about 600 to 1,100C. to produce the In₂O₃ powder. The In₂O₃ powder having a surface area of between about 5 to 18 m²/g and an average particle diameter of between about 40 to 160 nm is obtained. The In₂O₃ powder is applicable to form an ITO target for a high-quality, transparent electrode for a display, such as a liquid crystal display, electroluminescent display, or field emission display.