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Packaged microelectronic devices with pressure release elements and methods for manufacturing and using such packaged microelectronic devices

机译:具有压力释放元件的封装的微电子器件以及用于制造和使用这种封装的微电子器件的方法

摘要

Packaged microelectronic devices, interconnecting units for packaged microelectronic devices, and methods and apparatuses for packaging microelectronic devices with pressure release elements. In one aspect of the invention, a packaged microelectronic device includes a microelectronic die, an interconnecting unit coupled to the die, and a protective casing over the die. The interconnecting unit can have a substrate with a first side and a second side to which the die is attached, a plurality of contact elements operatively coupled to corresponding bond-pads on the die, and a plurality of ball-pads on the first side of the substrate electrically coupled to the contact elements. The protective casing can have at least a first cover encapsulating the die on the first side of the substrate. The packaged microelectronic device can also include a pressure relief element through at least a portion of the first cover and/or the substrate. The pressure relief element can have an opening to an external environment and a passageway to an internal location within the packaged microelectronic device. In operation, the pressure relief element releases gases or other forms of moisture entrapped by the casing and/or the substrate during high temperature processing of the packaged microelectronic device.
机译:封装的微电子器件,用于封装的微电子器件的互连单元,以及用于封装具有压力释放元件的微电子器件的方法和装置。在本发明的一个方面,一种封装的微电子器件包括微电子管芯,耦合到该管芯的互连单元以及在该管芯上的保护壳体。互连单元可具有衬底,该衬底具有附接有管芯的第一侧和第二侧,可操作地耦合到管芯上的相应键合焊盘的多个接触元件以及在管壳的第一侧上的多个球形焊盘。衬底电耦合到接触元件。保护性外壳可以具有至少第一盖,该第一盖将管芯封装在基板的第一侧上。封装的微电子器件还可包括穿过第一盖和/或基板的至少一部分的减压元件。泄压元件可具有通向外部环境的开口和通向封装的微电子器件内的内部位置的通道。在操作中,卸压元件在封装的微电子器件的高温处理期间释放由壳体和/或基板截留的气体或其他形式的水分。

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