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Process window enhancement for deep trench spacer conservation
Process window enhancement for deep trench spacer conservation
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机译:增强工艺窗口,以节省深沟隔离物
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摘要
In a process for manufacturing deep trench (32) memory cells, a method of enhancing the process window by better protecting the nitride spacer (52) prior to the process of stripping the pad nitride layer (38). The method also provides for the deposition of a nitride liner (64) and offers an additional advantage of not requiring the top shoulder (58) of the nitride spacer (52) to be over etched during its formation.
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