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Economic and low thermal budget spacer nitride process
Economic and low thermal budget spacer nitride process
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机译:经济和低热预算的间隔氮化物工艺
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摘要
An economic and low thermal budget spacer is provided for both the cap oxide and nitride spacer is provided by amido-based silicon precursors such as BTBAS with an oxide to form the cap oxide and with same precursor and ammonia to form the nitride in a single wafer process.
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