Manufacturing method of molecular film pattern, molecular film pattern, manufacturing method of semiconductor device, semicondctor device, manufacturing method of electro-optical device, electro-optical device, manufacturing method of electronic device, and electronic apparatus

摘要

object A molecular film having various functional groups, which is formed on a substrate, can be easily patterned by ultraviolet light; however, patterning which can be performed in a more shorter time has been desired. ;solving Means An organic silane molecular film, having a thickness of 3 nm or less and an aromatic hydrocarbon group as a part of the molecular structure of the film, is formed on the surface of the substrate.