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Method of manufacturing a substrate with directionally anisotropic warping
Method of manufacturing a substrate with directionally anisotropic warping
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机译:具有方向各向异性翘曲的基板的制造方法
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摘要
A semiconductor device substrate which can be easily conveyed and a semiconductor device fabrication method using the substrate. The semiconductor device fabrication method includes forming a solder resist on a semiconductor element mounting plate-shaped substrate having major and minor sides and containing organic matter, having a linear expansion coefficient A different from that of the substrate, warping the substrate along a minor-side direction, and conveying the warped substrate.
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