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Structures, lithographic mask forming solutions, mask forming methods, field emission display emitter mask forming methods, and methods of forming plural field emission display emitters

机译:结构,光刻掩模形成溶液,掩模形成方法,场致发射显示器发射极掩模形成方法以及形成多个场致发射显示器发射极的方法

摘要

The present invention includes structures, lithographic mask forming solutions, mask forming methods, field emission display emitter mask forming methods, and methods of forming plural field emission display emitters. One aspect of the present invention provides a mask forming method including forming a masking layer over a surface of a substrate; screen printing plural masking particles over a surface of the masking layer; and removing at least portions of the masking layer using the masking particles as a mask. Another aspect of the present invention provides a method of forming plural field emission display emitters. This method includes forming a masking layer over an emitter substrate; screen printing a plurality of masking particles over the masking layer; removing portions of the masking layer intermediate the screen printed masking particles to form a plurality of masking elements; removing the masking particles from the masking elements; and removing portions of the emitter substrate to form plural emitters.
机译:本发明包括结构,光刻掩模形成溶液,掩模形成方法,场发射显示发射器掩模形成方法以及形成多个场发射显示发射器的方法。本发明的一个方面提供了一种掩模形成方法,该方法包括:在基板的表面上形成掩模层;以及在掩模表面上形成掩模层。在掩蔽层的表面上丝网印刷多个掩蔽颗粒;使用掩模颗粒作为掩模去除掩模层的至少一部分。本发明的另一方面提供了一种形成多个场发射显示发射器的方法。该方法包括在发射极衬底上方形成掩模层;以及在掩模层上丝网印刷多个掩模颗粒;去除在丝网印刷的掩模颗粒中间的掩模层部分,以形成多个掩模元素;从掩蔽元件上去除掩蔽颗粒;去除部分发射极以形成多个发射极。

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