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Methods and apparatus for polarized reflectance spectroscopy

机译:偏振反射光谱法的方法和设备

摘要

Methods and apparatus for assessing the size of a scattering element of a sample. Primary radiation is generated from a source. The primary radiation is polarized to produce polarized primary radiation. The polarized primary radiation is directed to the sample to generate reflected radiation. The reflected radiation is directed through a polarizer to produce filtered reflected radiation, the polarizer being configured to select reflected radiation parallel and perpendicular to the polarization of the polarized primary radiation. The filtered radiation is detected, and a depolarization ratio is calculated using the detected filtered radiation. The size of the scattering element is calculated using the depolarization ratio.
机译:评估样品散射元素大小的方法和装置。初级辐射是从源产生的。初级辐射被极化以产生极化的初级辐射。偏振的初级辐射被引导到样品以产生反射辐射。反射辐射被引导通过偏振器以产生滤波后的反射辐射,该偏振器被配置为选择平行于和垂直于偏振初级辐射的偏振的反射辐射。检测过滤后的辐射,并使用检测到的过滤后的辐射计算去极化率。散射元件的尺寸是使用去极化比来计算的。

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