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Semiconductor device utilizing alignment marks for globally aligning the front and back sides of a semiconductor substrate

机译:利用对准标记使半导体衬底的正面和背面整体对准的半导体器件

摘要

The present invention provides for globally aligning microelectronic circuit systems, such as communication devices and chips, fabricated on or bonded to the front and back sides of one or more substrates to provide for wireless communications between the circuit systems through the one or more substrates. In one embodiment, two circuit systems situated on opposite sides of a substrate are aligned to provide for wireless communications between the two circuit systems through the substrate. In another embodiment, communication devices situated on one or more substrates are aligned to provide for wireless communications between the communication devices through the one or more substrates. In another embodiment, two chips situated on opposite sides of a transparent substrate are aligned to provide for wireless communications between the two chips through the transparent substrate.
机译:本发明提供了在一个或多个基板的正面和背面上制造或结合到一个或多个基板的正面和背面上的全局对准的微电子电路系统,例如通信设备和芯片,以提供通过一个或多个基板的电路系统之间的无线通信。在一个实施例中,位于基板相对侧上的两个电路系统被对准以提供通过基板的两个电路系统之间的无线通信。在另一实施例中,位于一个或多个基板上的通信设备被对准以提供通过一个或多个基板的通信设备之间的无线通信。在另一个实施例中,位于透明基板的相对侧上的两个芯片被对准以提供两个芯片之间通过透明基板的无线通信。

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