MICROELECTROMECHANICAL SENSORS HAVING REDUCED SIGNAL BIAS ERRORS AND METHODS OF MANUFACTURING THE SAME

摘要

A capacitive sensor such as a tuning-fork gyroscope or accelerometer having a reduced bias error. The electrical connection of the first capacitive plate to, e.g., a signal measuring device or a voltage source, induces a first voltage difference at the junction. The materials of the second capacitive plate are selected such that its electrical connection to, e.g., a signal measuring device or a voltage source, induces a second voltage difference that substantially offsets the first voltage difference and reduces the bias error. One embodiment forms the capacitive plates, e.g., a proof mass and a sense plate, from substantially identical doped semiconductors.