首页> 外国专利> Optoelectronic semiconductor device having mos field effect transistor with photodiode and method for fabricating the same

Optoelectronic semiconductor device having mos field effect transistor with photodiode and method for fabricating the same

机译:具有带光电二极管的mos场效应晶体管的光电子半导体器件及其制造方法

摘要

PURPOSE: AN optoelectronic semiconductor device having a MOS(Metal Oxide Semiconductor) FET(Field Effect Transistor), a photodiode and a manufacturing method thereof are provided to be capable of increasing optical gain by controlling the gate voltage of the MOS FET using the optical voltage generated by incident light. CONSTITUTION: An optoelectronic semiconductor device(100) is provided with a semiconductor substrate, the first conductive type high concentration source/drain region(131,132) formed in an active region of the semiconductor substrate and spaced apart from each other as much as a channel region, a gate isolating layer formed at the upper portion of the channel region, and a gate conductive layer(150) formed at the upper portion of the gate isolating layer. At this time, the gate conductive layer includes the first conductive type impurity region and the second conductive type impurity region.
机译:目的:提供一种具有MOS(金属氧化物半导体)FET(场效应晶体管)的光电半导体器件,光电二极管及其制造方法,以能够通过使用光电压控制MOS FET的栅极电压来增加光增益。由入射光产生。构成:一种光电子半导体器件(100),其具有半导体衬底,第一导电型高浓度源/漏区(131,132)形成在半导体衬底的有源区中并且彼此间隔开与沟道区一样多形成在沟道区的上部的栅极隔离层和形成在栅极隔离层的上部的栅极导电层(150)。此时,栅极导电层包括第一导电类型杂质区和第二导电类型杂质区。

著录项

  • 公开/公告号KR20030082062A

    专利类型

  • 公开/公告日2003-10-22

    原文格式PDF

  • 申请/专利权人 KIM SUNG JUNE;

    申请/专利号KR20020020591

  • 申请日2002-04-16

  • 分类号H01L31/12;H01L29/80;

  • 国家 KR

  • 入库时间 2022-08-21 23:46:06

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