PURPOSE: A calibration method of an X-Y stage is provided to be capable of improving the control precision of the X-Y stage by controlling the X-Y stage according to a corrected position command using a correction algorithm. CONSTITUTION: A correction algorithm is previously stored at a storage part for correcting the error between the commanded position of the X and Y axis of an X-Y stage, and a real position(S20). A host computer checks whether the position information of the X and Y axis of the X-Y stage is inputted by a worker, or not(S21). The host computer applies the stored correction algorithm to the inputted position information(S22). After calculating the error of the commanded position according to the application of the correction algorithm, the position command is corrected by the first control part according to the calculated error(S23,S24). After transmitting the corrected position command to the second control part by the first control part, the second control part controls a motor driving part according to the transmitted position command(S25).
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