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A method to avoid contaminations on a sensor chip and the use of an additional heater, on a sensor chip

机译:一种避免污染传感器芯片并在传感器芯片上使用附加加热器的方法

摘要

In the case of a sensor chip according to the prior art, impurities of a flowing medium in the range of a sensor region and the permanently soiled, whereby, to a negative influence on the measuring reaction of the membrane. Dollars a in the case of an inventive sensor chip (1) is a supplementary heater (39) is arranged, of the upstream and in a distinct distance from the sensor region is arranged. This leads to the fact that the impurities of the flowing medium in the region of the supplementary heater (39), and that is to say, therefore, no longer to the sensor region (17) can pass.
机译:在根据现有技术的传感器芯片的情况下,流动介质的杂质在传感器区域的范围内并且被永久地污染,从而对膜的测量反应产生负面影响。在本发明的传感器芯片(1)的情况下,美元a被布置为辅助加热器(39),其位于上游并且与传感器区域相距一段距离。这导致以下事实,即,在辅助加热器(39)的区域中的流动介质的杂质可以通过,也就是说,不再可以到达传感器区域(17)。

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