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Process and calibration device for testing semiconductor wafers automatically uses calibrating wafer to calibrate the device before inserting wafer to be tested
Process and calibration device for testing semiconductor wafers automatically uses calibrating wafer to calibrate the device before inserting wafer to be tested
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机译:用于测试半导体晶圆的工艺和校准设备会自动使用校准晶圆来校准设备,然后再插入要测试的晶圆
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摘要
A process for testing wafers in a test machine which can be calibrated automatically places a calibrating wafer (107) in the machine, calibrates it by means of a control unit and then inserts the wafer to be tested into the calibrated machine. An Independent claim is also included for a calibrating wafer for the above process.
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