A method for testing of wafers with the use of a calibrating wafer and the associated calibrating brie wafer

摘要

A method for testing of wafers (101) to be tested in a test device (100), in which the test device (100) can be calibrated, comprising the steps of:a) introducing (s301) of a calibrating wafer (102) in the testing device (100) by means of a handling unit (103), whereina1) at least one calibrating wafer (102) which, in terms of its geometry and its contact terminals (111) to be tested in an identical manner to a wafer (101), can be predetermined during at least a test flow, in the case of the wafer to be tested (101) are tested in the testing device (100) is introduced; anda2) calibrating of identical construction components (107) for different arrangements of contact terminals (111) are provided;b) determining (s302) of calibration values of the test means (100) by means of a control by means of a calibrating a sequence control unit (105);c) storing (s303) of the specific calibration values in a memory unit (106);d) calibrating (s304) of the test means (100) by means of the stored calibration values;e) outputting the calibrating wafer (102) of the calibrated test device (100);f) introducing (s301) of a wafer to be tested..