Research on Calibration Uncertainty Evaluation Method of Transfer Standards for Calibrating the On-Wafer Load-Pull System

摘要

This paper introduces in-situ calibration method of on-wafer load-pull system, researches the calibration uncertainty evaluation method of transfer standards for calibrating the on-wafer load-pull system. Using the GUM uncertainty framework and Mont Carlo Method (MCM) suggested by ISO/IEC to evaluate the calibration uncertainty separately. At last, by analyzing the results of two methods, this paper gives the reasonable transfer standards' uncertainty for calibrating the on-wafer load-pull system.