ENERGIZATION PROCESSOR AND MANUFACTURING DEVICE OF ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an energization processor which effectively prevents splitting of a substrate which is caused by temperature difference of the substrate, and is used appropriately for the manufacturing process of an electron source.;SOLUTION: A conductive body, disposed on a substrate 10, is energized in a depressurized atmosphere with an energization processing unit. A vessel 12 covers the conductive body and a region which is a part of a substrate surface where the conductive body is arranged, and comprises an exhaust port 16 to form an airtight atmosphere along with the substrate, a thermal conductive member 71 has a first temperature control mechanism for controlling the temperature in the region which is a part of the substrate, a thermal conductive member 72 has a second temperature control mechanism for controlling the temperature in a region other than that part of the substrate.;COPYRIGHT: (C)2004,JPO&NCIPI