Energization processing apparatus and electron source manufacturing apparatus

摘要

In an energization processing apparatus for performing, in a reduced-pressure atmosphere, an energization process on electric conductors which are placed on a substrate, separate temperature controlling mechanisms are provided for a vacuum region on the substrate where the electric conductors are placed and for the other region of the substrate, to thereby reduce a temperature difference on the substrate and avoid breakage of the substrate due to a difference in thermal expansion coefficient.