VACUUM COOLING DEVICE WITH ULTRASONIC CLEANING FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a vacuum cooling device with an ultrasonic cleaning function automatically performing the cleaning and capable of performing the cleaning to details.;SOLUTION: This vacuum cooling device comprising a pressure reduction chamber 1 for accommodating a cooled object therein, and reducing the pressure of the pressure reduction chamber to cool the cooled object, further comprises a cleaning fluid supply means 5 for supplying the cleaning fluid into the pressure reduction chamber 1, a discharge means 6 for discharging the cleaning fluid in the pressure reduction chamber 1, and an ultrasonic wave vibrator 7 for giving the ultrasonic vibration to the cleaning fluid in the pressure reduction chamber 1.;COPYRIGHT: (C)2004,JPO