THIN PLATE GRIPPING DEVICE, THIN PLATE CONVEYING DEVICE, AND THIN PLATE INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thin plate gripping device, a thin plate conveying device, and a thin plate inspecting device capable of stably holding a thin plate, with a simple structure, at a certain height, and at a high accuracy.;SOLUTION: A press up force is applied to the thin plate 22 by an air pressure suspending device 26, the support body 30 angularly displaced by a rotary shaft 31 supports the suspended thin plate 22 from the upside and holds the thin plate 22 in the suspended state. The rotary shaft 31 is angularly displaced by a driving device 32, which angularly displaces the support body 30 via the rotary shaft 31, and a control means 28 performs control so that the height of the held thin plate 22 is a constant.;COPYRIGHT: (C)2004,JPO&NCIPI