CLOSED ACIDIC COPPER PLATING SYSTEM AND HEAT RESISTANT ACIDIC COPPER PLATING BATH UTILIZED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a practical closed acidic copper plating system.;SOLUTION: The closed acidic copper plating system has an acidic copper plating main tank, and a recovery tank and counter-current rinsing tank disposed in succession thereto, in which the acidic copper plating liquid recovered in the recovery tank is composed to serve as a replenishing liquid for acidic copper plating after removal of impurities in an impurity removing apparatus and thickening of the liquid at need. The warmth resistant acidic copper plating liquid bath contains copper sulfate, sulfuric acid and chlorine ions as the basic composition to be advantageously used for the same and further contains a polyether compound, sulfur compound and nitrogen-containing compound as additive components. An alkylene oxide addition type amine compound is further added thereto.;COPYRIGHT: (C)2004,JPO