CAP MELT THIN FILM MANUFACTURING METHOD, AND METHOD FOR MANUFACTURING MGB2 SUPERCONDUCTING THIN FILM USING THE METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a method for obtaining a compound thin film of sufficient characteristics by manufacturing a thin film formed of a compound consisting of components of greatly different melting points, accordingly a compound consisting of components of greatly different vapor pressures, by a vacuum vapor deposition method, and heat-treating the obtained thin film in the same vacuum, and to provide a MgBSB2/SBsuperconducting thin film manufacturing method using the method. PSOLUTION: A base layer 12 consisting of components of different melting points is deposited on a substrate 11 under a high vacuum, and a cap layer 13 consisting of a component of higher melting point out of the components of the compound is deposited on the base layer 12. The reaction of the components is performed by the heat treatment at a temperature below the melting point of the component of higher melting point to obtain a compound thin film 14. PCOPYRIGHT: (C)2004,JPO