MgB2 superconducting thin films sequentially fabricated using DC magnetron sputtering and thermionic vacuum arc method

摘要

In this work, we discuss fabrication and characterization of MgB2 thin films obtained by sequential deposition and annealing of sandwich like Mg/B/Mg thin films on glass substrates. Mg and B films were prepared using DC magnetron sputtering and thermionic vacuum arc techniques, respectively. The MgB2 thin films showed superconducting critical transition at 33 K after annealing at 650 °C.