DEVICE AND METHOD FOR PREDICTING END OF LOT PROCESS OF SEMICONDUCTOR MANUFACTURING DEVICE AND MEDIUM FOR RECORDING PROGRAM FOR PREDICTING END OF LOT PROCESS

摘要

PPROBLEM TO BE SOLVED: To provide a device and a method for predicting the time when a lot process ends by collecting the operating states of the processing chambers of a semiconductor manufacturing device, and accurately determining a wafer conveyance path. PSOLUTION: The device comprises a first collection means for collecting the operating states of a processing chamber 101 of the semiconductor manufacturing device 3; a second collection means for collecting the number of workpieces before processing and the names of recipes; a computing means for computing the time when the lot process ends based on the results collected by the first collection means 1 and the second collection means 2; and a means for outputting the computation results. As a result, the conveyance path can be specified by collecting the usable/unusable states of the processing chamber 101 of the semiconductor manufacturing device 3, and the time when the lot process is expected to end can be predicted more accurately. PCOPYRIGHT: (C)2005,JPO&NCIPI