ELECTROCONDUCTIVE THIN FILM PATTERN, METHOD OF FORMING THE SAME, METHOD OF PRODUCING THIN FILM MAGNETIC HEAD, METHOD OF PRODUCING THIN FILM INDUCTOR AND METHOD OF PRODUCING MICRODEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electroconductive thin film pattern of high precision having a high aspect ratio, to provide methods of forming the same, and to provide a method of producing a thin film magnetic head, a thin film inductor and a microdevice comprising the same electroconductive thin film pattern.;SOLUTION: A stacked structure comprising two electroconductive layer patterns formed by plating growth with an electrode film as a substrate film pattern, and an intermediate electroconductive layer pattern held inbetween is provided, so that the thicker electroconductive thin film pattern can be obtained. Further, after the formation of the intermediate electroconductive layer covering a first resist frame, a second resist frame is formed on a position corresponding to the first resist frame, so that the first and second resist frames can be stacked without causing intermixing. Thus, the thicker electroconductive thin film pattern can easily be formed at a high precision.;COPYRIGHT: (C)2004,JPO