MICROWAVE POWER SUPPLY SYSTEM AND TRAVELLING-WAVE POWER CONTROL METHOD OF MICROWAVE POWER SUPPLY SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a microwave power supply system and a travelling-wave power control method of the microwave power supply system by propagating a load-side supply power of a given value further toward the load side than an input end 3a of a manual matching unit 3, by keeping the load-side supply power value PL at a given value through an incremental compensation of a travelling-wave power value PF by the value by which a reflective wave power value PR is increased and the load-side supply power value PL is decreased, without augmenting a processing time and without augmenting an adjustment man-hour.;SOLUTION: With the microwave power supply system and its travelling-wave power control method, an output power setting signal Vst and a reflective wave power value signal Vpr corresponding in size to the reflective wave power value PR are added without changing the movable position of the impedance element from an initial operation state even at processing after the initial operation state of the system, and a magnetron supply power PM making an anode current Ia of the magnetron change in accordance with the above added signals is supplied to the magnetron to output the travelling wave power PF from the output end of a microwave power source 1.;COPYRIGHT: (C)2004,JPO