STRUCTURE OF AIR INJECTION PORT AND CURVATURE SETTING DEVICE FOR POLISHING TOOL

摘要

PROBLEM TO BE SOLVED: To provide the structure of an air injection port part reducing damage of an injection port member and air leakage, surely preventing intrusion of abrasive from an air injection port and a counterflow of the air to the air injection port, and quickly performing the injection in a simple structure.;SOLUTION: The air injection port part 95 is formed of the injection port member 98 and a cover member 102 formed of rubber and the like. The injection port member 98 is provided with a diametrical air injection port 104 opened to the outer circumference and connected to an air feeder. The cover member 102 comprises a disk-shaped elastic deformation part 102A having an opening 115 in its center and closely contacting with the upper surface of the injection port member 98, and a cylindrical part 102B surrounding the outer circumference of the injection port member 98. When the air is fed to the air injection port 104 to increase the internal pressure, the elastic deformation part 102A is upward elastically deformed, separated from the upper surface of the injection port member 98 and closely contacts with the lower surface 43a of a valve body 43 so as to connect a valve 27 to the air injection port 104.;COPYRIGHT: (C)2004,JPO