METHOD FOR FORMING SINGLE CRYSTAL THIN FILM ON ELECTROMAGNETIC STEEL SUBSTRATE, AND SINGLE-CRYSTAL THIN-FILM DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a single-crystal thin film on an electromagnetic steel substrate and a single-crystal thin-film device, which enables growth of a good quality single-crystal thin film on an electromagnetic steel sheet, by employing a laser MBE device on a substrate which has been planarized on atomic level.;SOLUTION: The surface of the electromagnetic steel substrate 12 is subjected to CMP substrate polishing by colloidal silica, followed by annealing under an ultra-high vacuum condition to form on the substrate 12 a crystalline surface which is flat at an atomic level. An oxide film on the flat crystal surface is removed by heat treatment to grow a group III nitride by laser MBE method using a target 11 on the substrate 12 which has been planarized at an atomic level.;COPYRIGHT: (C)2004,JPO