Pattern divided method of mask for copying and mask for copying, and production method of mask for copying

摘要

Being the mask for copying in order to copy copying pattern to the suffering copying baseplate making use of the energy beam, forming opening pattern in the thin film section which is supported in the support framework section, when copying pattern, it is the cover pattern where at least one place is connected to the periphery in the pattern in the mask for copying which becomes, the surface area of the copying mask upper pattern surface/ratio of the cross-sectional area of the part where the support section it has done, divides develops the cover pattern part which is larger than 5000.