首页>
外国专利>
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed
展开▼
机译:用于半导体或液晶制造装置的支架以及安装有该支架的半导体或液晶制造装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
Affords holders for semiconductor or liquid-crystal manufacturing devices—and semiconductor manufacturing devices in which the holders are installed—in which temperature uniformity in the processed-object retaining face of their resistive-heating-element containing ceramic susceptor is enhanced. By arranging a metal plate on a resistive-heating-element containing ceramic susceptor opposite its processed-object retaining side, the surface temperature of a semiconductor wafer or LCD glass being retained on the susceptor can be made uniform. Although simply setting the metal sheet on the ceramic susceptor is efficacious, fastening it by bonding, screws, snug-fitting, or vacuum adhesion further enhances the efficacy.
展开▼