首页> 外国专利> Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed

Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed

机译:用于半导体或液晶制造装置的支架以及安装有该支架的半导体或液晶制造装置

摘要

Affords holders for semiconductor or liquid-crystal manufacturing devices—and semiconductor manufacturing devices in which the holders are installed—in which temperature uniformity in the processed-object retaining face of their resistive-heating-element containing ceramic susceptor is enhanced. By arranging a metal plate on a resistive-heating-element containing ceramic susceptor opposite its processed-object retaining side, the surface temperature of a semiconductor wafer or LCD glass being retained on the susceptor can be made uniform. Although simply setting the metal sheet on the ceramic susceptor is efficacious, fastening it by bonding, screws, snug-fitting, or vacuum adhesion further enhances the efficacy.
机译:用于半导体或液晶制造装置的Affords支架和安装有该支架的半导体制造装置,其中其包含电阻加热元件的陶瓷基座的被加工物保持面的温度均匀性得到提高。通过在与加工对象物保持侧相反的包含陶瓷基座的电阻加热元件上布置金属板,可以使保持在基座上的半导体晶片或LCD玻璃的表面温度均匀。尽管简单地将金属片放置在陶瓷基座上是有效的,但是通过粘结,螺钉,紧密配合或真空粘合来固定它可以进一步提高功效。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号