Radiation-generating devices are disclosed that are suitable for use in a microlilhography apparatus. The devices utilize multiple plasma-discharge radiation sources (e.g., capillary discharge X-ray sources) and produce a high output with a high repeat frequency while minimizing the thermal loads to which the individual radiation sources are subjected. In one embodiment, multiple radiation sources (discharge units) are coupled to a movable substrate, such as a rotary plate. The movable substrate can be controlled such that a selected one of the multiple discharge units can be moved into a discharge position and aligned along a discharge axis. The device may also include a preliminary-ionization source facing the discharge axis. Alternatively, multiple preliminary4onization sources may be coupled to the movable substrate such that a selected one of the preliminary ionization sources energizes the target gas in the selected discharge unit.
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