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SEESAW-SHAPE ELECTROSTATIC DRIVE MICRO GYROSCOPE

机译:SEESAW形状的静电驱动微陀螺仪

摘要

PURPOSE: A seesaw-shape electrostatic drive micro gyroscope is provided to amplify and transmit Coriolis force and accordingly improve the sensing capacity for angular velocity by seesawing suspended structures of large and small masses if the mass of the suspended structure is small, the Coriolis force is reduce, and then sensing capacity is decreased. CONSTITUTION: A seesaw-shape electrostatic drive micro gyroscope is composed of first and second structures(1a,2b) driven in a seesaw type toward a third axis vertical to a substrate for forming a plane comprising a first axis and a second axis crossing the first axis of a rectangular coordinate to incline the center of gravity to one side and amplify and transmit displacement to the third axis; a first supporting beam for supporting the first suspended structure; a first fixing device for fixing the first supporting beam; a second supporting beam for connecting the first and second suspended structures; an exciting device for exciting the first suspended structure to the first axis; an angular velocity sensing device arranged on the substrate right under the first and second suspended structures to sense that the two suspended structures are displaced toward the third axis when rotary power around the second axis is generated; and a second fixing device connected to the center of gravity of the first and second suspended structures of the second supporting beam to reduce sensitivity for acceleration.
机译:目的:提供一种跷跷板形状的静电驱动微型陀螺仪,以放大和传递科里奥利力,并通过倾斜大小较大的悬浮结构来提高角速度的感应能力,如果该悬浮结构的质量小,则科里奥利力为降低,然后降低传感能力。构成:一种跷跷板形状的静电驱动微型陀螺仪,由第一和第二结构(1a,2b)以跷跷板型向垂直于基板的第三轴驱动,以形成一个平面,该平面包括第一轴和与第一轴交叉的第二轴直角坐标轴,将重心倾斜到一侧,并将位移放大并传递到第三轴;第一支撑梁,用于支撑第一悬挂结构;第一固定装置,用于固定第一支撑梁;第二支撑梁,用于连接第一悬挂结构和第二悬挂结构。用于将第一悬置结构激励到第一轴线的激励装置;角速度感测装置布置在基板上的第一和第二悬置结构的正下方,以在产生围绕第二轴的旋转动力时感测两个悬置结构向第三轴移位;第二固定装置,其连接到第二支撑梁的第一和第二悬挂结构的重心以减小加速度的灵敏度。

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