Electrostatic drive, method for operating a micromechanical component with an electrostatic drive and manufacturing method for an electrostatic drive

摘要

Electrostatic drive with at least a first intermediate frame (10), a second intermediate frame (10) framing the first intermediate frame (10) and a third intermediate frame (10) framing the first intermediate frame (10) and the second intermediate frame (10); two adjacent intermediate frames in each case (10) the at least three intermediate frames (10) are connected to one another via at least one intermediate spring (14); the at least two intermediate springs (14) being arranged such that the longitudinal directions of the intermediate springs (14) lie on a first axis of rotation (16); and wherein intermediate electrode fingers (22) are arranged on frame bars (10a) of the at least three intermediate frames (10) which are aligned parallel to the first axis of rotation (16); characterized by an outer frame (12) which frames the at least three intermediate frames (10) and which over at least an outer spring (18) is connected to the outermost intermediate frame (10) of the at least three intermediate frames (10), the minde at least one outer spring (18) is arranged in such a way that a longitudinal direction of the at least one outer spring (18) lies on a second axis of rotation (20) which is not aligned parallel to the first axis of rotation (16), and wherein outer electrode fingers (30 ) are arranged on frame beams (10b, 12a) of the outer frame (12) and the outermost intermediate frame (10) of the at least three intermediate frames (10) aligned parallel to the second axis of rotation (20).