Radio frequency device using microelectronicmechanical system technology

摘要

PURPOSE: A high frequency device using an MEMS(Micro Electronic Mechanical System) technique is provided to be capable of reducing an operation voltage and improving operation speed. CONSTITUTION: A high frequency device using an MEMS technique is provided with a substrate(50) and the first electrode(51) loaded on the substrate for forming an actuator. At this time, the first electrode is partially connected with the substrate. The high frequency device further includes the second electrode(54) spaced apart from the main surface of the substrate and partially overlapped with the first electrode for forming the actuator. The contact point between the first and second electrode is formed by the electrostatic attractive force induced between the first electrode and the second electrode.