SOURCE SOLUTION FOR PREPARATION OF BISMUTH-BASED FERROELECTRIC FILM AND PREPARATION METHOD THEREOF

摘要

PURPOSE: A source solution for the preparation of a bismuth-based ferroelectric film and its preparation method are provided, to allow the Perovskite structure to be formed easily at a low temperature by accelerating the degradation reaction between sources, thereby improving the crystallinity of a thin film. CONSTITUTION: The method comprises the steps of preparing a metal alkoxide of a metal element A selected from the group consisting of Ti, Nb and Ta; hydrolyzing the metal alkoxide to prepare a source solution of a metal element A; and dissolving the source solution of a metal element A, a metal element B selected from Sr and La and bismuth (Bi) in a mixture solvent to prepare a source solution for the preparation of a bismuth-based ferroelectric film. Preferably the source of a metal element B is Sr(OCOC7H15)5 or La(OCOC7H15)3; and the source of Bi is Bi(OCOC7H15)3.