首页> 外国专利> APPARATUS FOR SUPPLYING PHOTORESIST TO REPLACE BOTTLE WITH PHOTORESIST BY ANOTHER BOTTLE WITH SAME PHOTORESIST WHEN PHOTORESIST IN BOTTLE IS COMPLETELY CONSUMED

APPARATUS FOR SUPPLYING PHOTORESIST TO REPLACE BOTTLE WITH PHOTORESIST BY ANOTHER BOTTLE WITH SAME PHOTORESIST WHEN PHOTORESIST IN BOTTLE IS COMPLETELY CONSUMED

机译:完全消耗瓶子中的光阻时,用另一只具有相同光阻的瓶子来代替光阻的装置

摘要

Purpose: when the photoresist in bottle is with being completely consumed, a device for providing photoresist is arranged to replace to have a photoresist with another bottle with identical photoresist, bottle is led including the bossed protrusion of first bottle of tool and first, there is the slot of the intaglio for the protrusion for being coupled to protuberance. Construction: multiple bottles (120a, 120b) have mutually different shape, contain mutually different photoresist. Multiple bottles (130a, 130b) of leading meet big measuring bottle, corresponding and instruct the corresponding solution position of each bottle with respective bottle.
机译:目的:当瓶中的光致抗蚀剂被完全消耗时,设置一个提供光致抗蚀剂的装置,以用另一个具有相同光致抗蚀剂的瓶子替换光致抗蚀剂,引导瓶子,包括工具的第一个瓶子的凸起突起,首先,凹版的槽,用于与凸起相结合的突起。结构:多个瓶子(120a,120b)形状互不相同,包含相互不同的光刻胶。引导的多个瓶子(130a,130b)与大的量瓶相遇,并用各自的瓶子指示每个瓶子的相应溶液位置。

著录项

  • 公开/公告号KR20040082483A

    专利类型

  • 公开/公告日2004-09-30

    原文格式PDF

  • 申请/专利权人 SAMSUNG ELECTRONICS CO. LTD.;

    申请/专利号KR20030017026

  • 发明设计人 CHOI JIN U;

    申请日2003-03-19

  • 分类号H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-21 22:47:59

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