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APPARATUS FOR SUPPLYING PHOTORESIST TO REPLACE BOTTLE WITH PHOTORESIST BY ANOTHER BOTTLE WITH SAME PHOTORESIST WHEN PHOTORESIST IN BOTTLE IS COMPLETELY CONSUMED
APPARATUS FOR SUPPLYING PHOTORESIST TO REPLACE BOTTLE WITH PHOTORESIST BY ANOTHER BOTTLE WITH SAME PHOTORESIST WHEN PHOTORESIST IN BOTTLE IS COMPLETELY CONSUMED
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机译:完全消耗瓶子中的光阻时,用另一只具有相同光阻的瓶子来代替光阻的装置
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摘要
Purpose: when the photoresist in bottle is with being completely consumed, a device for providing photoresist is arranged to replace to have a photoresist with another bottle with identical photoresist, bottle is led including the bossed protrusion of first bottle of tool and first, there is the slot of the intaglio for the protrusion for being coupled to protuberance. Construction: multiple bottles (120a, 120b) have mutually different shape, contain mutually different photoresist. Multiple bottles (130a, 130b) of leading meet big measuring bottle, corresponding and instruct the corresponding solution position of each bottle with respective bottle.
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