Monolithic array of thin film resonators, method of manufacturing the same, and monolithic thin film resonator grating filter and manufacturing method thereof

摘要

Spaced conductive film strips positioned on the substrate to define a set of first I / O terminals, a piezoelectric material layer positioned on the conductive film, and a piezoelectric material layer positioned on the piezoelectric layer orthogonal to the first strip to form a cross- And a conductive strip of spaced apart conductive films, each defining a set of thin film resonators and second I / O terminals. The plurality of portions of the dielectric film are disposed on the selected cross regions to mass load the thin film resonators to lower the resonant frequency.