Method for measuring fail probability by only defect, method for measuring defect limited yield using classification the extracted defect pattern's parameter, and system for measuring fail probability by only defect and the defect limited yield

摘要

A method of calculating a probability of failures caused only by defects, a method of calculating a defect limited yield using the classification of pattern parameters extracted only from the defects, and a system for calculating the probability of failure and the defect limited yield are provided. In one exemplary embodiment for calculating a probability of failures caused only by defects, defects are detected in inspected blocks that have defects and in blocks located around the inspected blocks to measure the number of inspected blocks that have failures caused by reasons other than the defects in the blocks located around the inspected blocks having defects (n 1 ), the number of inspected blocks having no failures in the blocks located around the inspected blocks having the defects (n 2 ), the number of inspected blocks having failures caused by defects in the inspected blocks having defects (n 3 ), and the number of inspected blocks having no failures in the inspected blocks having defects (n 4 ). The data (n 1 ) through (n 4 ) is then substituted in the following formula: maths id="MATH-US-00001" num="00001" MATH OVERFLOW="SCROLL" MROW MROW MIKR/MI MO=/MO MROW MN1/MN MO-/MO MFRAC MROW MN1/MN MO-/MO MSUB MIKR/MI MN1/MN /MSUB /MROW MROW MN1/MN MO-/MO MSUB MIKR/MI MN0/MN /MSUB /MROW /MFRAC /MROW /MROW MO,/MO /MROW /MATH /MATHS where maths id="MATH-US-00002" num="00002" MATH OVERFLOW="SCROLL" MROW MSUB MIKR/MI MN0/MN /MSUB MO=/MO MFRAC MIn1/MI MROW MIn1/MI MO+/MO MIn2/MI /MROW /MFRAC /MROW /MATH /MATHS and maths id="MATH-US-00003" num="00003" MATH OVERFLOW="SCROLL" MROW MSUB MIKR/MI MN1/MN /MSUB MO=/MO MROW MFRAC MIn3/MI MROW MIn3/MI MO+/MO MIn4/MI /MROW /MFRAC MO./MO /MROW /MROW /MATH /MATHS