The present invention is the shape of O-ring, a sealing material applied to the semiconductor equipment and TFT-LCD used in the DIFFSION CVD process, the sputter process, the dry etching process, and the like. The present invention relates to a sealing material for semiconductor equipment capable of improving the durability of semiconductor equipment and sealing materials and improving the vacuum degree and device life of the semiconductor equipment.;The present invention is a sealing material for semiconductor equipment having a dovetail, characterized in that the sealing material is a sealing material consisting of an arcuate cross-sectional shape in the rectangular body.;As such, the present invention has an effect that the sealing force of the semiconductor equipment is excellently improved during the semiconductor manufacturing process, and the sealing material is not easily etched, thereby improving the durability.;In addition, the present invention has a convenience that can be easily coupled because the coupling position is accurate during maintenance, repair and repair of semiconductor equipment, and has the effect of extending the life of the device by excellent durability without easy damage.
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