Material evaporation chamber incorporating a vacuum chamber divided into two separately pumped volumes by a wall with apertures centered on the principal axis of a material source which can be individually opened or closed

摘要

A material evaporation chamber comprises a vacuum chamber (10) and a first pumping unit (13). A wall (23) which can provide a total or partial seal divides the chamber into first (25) and second (22) volumes. Certain material sources (17) with a principal axis (18) are placed in the second volume which is pumped by a second pumping unit (24) and other material sources (21) are placed in the first volume. The wall incorporates apertures (26) centered on the principal axis and is provided with a means (27) for blocking or opening each aperture, controlled individually to protect the material sources having an unused principal axis.