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ABSORBANCE ANALYZER, ABSORBANCE ANALYZING METHOD, FLOW CELL AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

机译:吸光度分析仪,吸光度分析方法,流式细胞和半导体器件制造方法

摘要

PROBLEM TO BE SOLVED: To provide an absorbance analyzer constituted so as to eliminate the leak of a liquid from a slide part accompanying an increase in flow pressure at the time of reduction of an optical path length and capable of precisely analyzing the absorbance characteristics of the liquid by obtaining a predetermined optical path length with high reproducibility.;SOLUTION: The absorbance analyzer is constituted so as to be equipped with a pair of light transmissible flat plates 11a and 11b for forming an optical path through which the liquid flows, an optical path altering mechanism 13 for moving at least one flat plate to alter the length of the optical path, a light source 2 for emitting the incidence light to the optical path, an optical sensing means 3 for sensing the intensity of the transmitted light from the optical path, an analyzing means 4 for analyzing absorbance characteristics from the intensity of incident light and transmitted light and a position adjusting means 5 for adjusting the position of at least one of the pair of the flat plates 11a and 11b.;COPYRIGHT: (C)2005,JPO&NCIPI
机译:解决的问题:提供一种吸光度分析仪,其构造为消除在光程长度减小时伴随着流动压力增加而从滑动部件泄漏的液体,并且能够精确地分析吸光度分析仪的吸光度特性。解决方案:吸光度分析仪的构造使其配备有一对透光平板11a和11b,以形成液体流经的光路,即光路。改变机构13,其用于移动至少一个平板以改变光路的长度;光源2,其用于向光路发射入射光;光感测装置3,其用于感测来自光路的透射光的强度,分析装置4,其用于根据入射光和透射光的强度来分析吸光度特性,以及位置调节装置第5条,用于调整一对平板11a和11b中至少一个的位置。版权所有:(C)2005,JPO&NCIPI

著录项

  • 公开/公告号JP2005221298A

    专利类型

  • 公开/公告日2005-08-18

    原文格式PDF

  • 申请/专利权人 MITSUBISHI ELECTRIC CORP;

    申请/专利号JP20040027881

  • 发明设计人 FUJINO NAOHIKO;KINUGAWA MASARU;

    申请日2004-02-04

  • 分类号G01N21/05;G01N21/33;

  • 国家 JP

  • 入库时间 2022-08-21 22:36:06

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