UNIMORPH TYPE PIEZOELECTRIC FILM ELEMENT AND ITS MANUFACTURING METHOD, AND UNIMORPH TYPE INK JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide a low-cost and high-quality ink jet head.;SOLUTION: On a diaphragm; a bottom electrode, a film having piezo-electricity, and a top electrode are formed in order. Between the diaphragm and the film having piezo-electricity, a film having a coefficient of thermal expansion larger than that of the film having piezo-electricity is formed in such a manner that satisfied: (coefficient of thermal expansion of the film having a coefficient of thermal in expansion larger than that of the film having piezo-electricity × thickness × Young's modulus)-(coefficient of thermal expansion of the diaphragm × thickness × Young's modulus)≥(coefficient of thermal expansion of the film having piezo-electricity × thickness × Young's modulus). The film having piezo-electricity is formed by sputtering so as to satisfy a formula of (average free path of metal atoms knocked out of a target)≥(distance between target and substrate).;COPYRIGHT: (C)2005,JPO&NCIPI