PIEZOELECTRIC ELEMENT, INK JET TYPE RECORDER HEAD USING THE SAME, INK JET PRINTER AND MANUFACTURE OF PIEZOELECTRIC THIN-FILM ELEMENT

摘要

PROBLEM TO BE SOLVED: To eliminate the effects of a remaining strain of a piezoelectric film by specifying the width of the grain boundary of the piezoelectric film, and eliminating the presence of foreign substances after polarizing an element thereof to form a discontinuous layer with the crystal grain boundary which is not continuous to the orientation of adjacent crystal grains. ;SOLUTION: None or little foreign substrate exists even after polarizing a piezoelectric film element at the grain boundary of crystals of a piezoelectric film 15, also the grain boundary width is 5 nm or less, it is a discontinuous layer with the crystal grain boundary which is not continuous to the orientation of adjacent crystal grains. Such a structure is suitably attained even in the gel-sol method, utilizing the MOD process for manufacturing the piezoelectric film 15. This manufacturing method is for preparing an inorg. oxide by suppressing the hydrolysis of a metal alkoxide/acetate, using alkanolamine or acetylacetone, etc., and heating and baking a stably dispersed sol.;COPYRIGHT: (C)1999,JPO