Fabrication of High-Performance Piezoelectric Thick Films on Si for a Micropump of the Ink-jet Printer Head

摘要

The piezoelectric thick films were fabricated onrnsilicon substrates by screen printing method. Byrndeveloping a low-temperature sinterable piezoelectricrncomposition and a new poling technique, wernfabricated the high-performance piezoelectric thickrnfilms on silicon which can be applied for piezoelectricrnMEMS applications such as micropumps of the ink jetrnprinter heads.